電容式
•Full scale ranges from 1 to 1000 Torr with pushbutton zeroing and optional setpoint control providing ease of integration
•Excellent long-term signal stability and repeatability
•Fast recovery from atmospheric pressures and rapid stabilization after start-up reduces process cycle times
•Application robustness is achieved through a corrosion resistant ceramic sensor with sensor-shielding protection
•Highest level of accuracy
•Excellent long-term signal stability and repeatability
•Fast recovery from atmospheric pressures and rapid stabilization after start-up reduces process cycle times
•Application robustness is achieved through a corrosion resistant ceramic sensor with sensor-shielding protection
•Highest level of accuracy
